In coating equipments such as chemical/physical vapor deposition (CVD/PVD), some shields are assembled to prevent films from attaching to inner surface of chambers. However, particles will occur because incrustation exfoliates by repeat coating. Therefore it is necessary to change shields regularly. The renewal treatment of the shields is often carried out since it costs to manufacture new shields.
Renewal Micro Cleaning (RMC) is a technology of to remove extraneous matter with minimum damages for shields. In addition, this technology is applied to detoxify before discarding polluted parts.
| Extraneous | metals, metal oxide, metal nitride, half metals,semiconductors, fluoride, silane compounds |
|---|---|
| Substrates | stainless steel, aluminum (Al), titanium (Ti), molybdenum (Mo), tungsten (W), tantalum (Ta), quartz, plastics, ceramics, etc... |
- Aluminum product
- Stainless steel chamber
- Alumina product
- Exhaust duct
- Valve
- Ceramics product
- HYPOX
- HYPOX is the machine which removing polymer resins attached to metal filters developed by MOVEngineering of Italy. The cleaning process uses a hydrolysis reaction without damages for products because unused of chemical solution.
