Recently extreme high vacuum (XHV) environment is required in the most-advanced science and technology such as semiconductor manufacturing devices, analysis equipments and particle accelerators. From this, titanium (Ti) with a good vacuum property attracts attention. We have developed “San-titan” which is chemical polishing (CP) process for exclusive use of Ti with Yamaguchi University.
| Materials | titanium (Ti) |
|---|---|
| Standard polishing amount | 10 μm |
| Size | please contact (promptitude : 1000 x 1000 x 700 mm) |
Comparison of Ti surface with various treatments.
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Basis metal
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Buffing
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San-titan
Outgassing rate / unit area (Ti)
Outgassing rate is equal to mechanochemical polishing (MCP) treated sample !
With vacuum baking,
outgassing 〜10-12 Pa・m・s-1!
Cross-sectional TEM micrograph, nearly surface region after San-titan.
After San-titan, the surface was covered by homogeneous oxidized layer. Therefore it is suppressed that the outgassing from inside of metals.
Inner surface condition of Ti pipe (OD = 40 mm)
