We have developed “SUSpika” which is chemical polishing (CP) process for exclusive use of stainless steel with ULVAC, Inc.. SUSpika achieves good surface condition and vacuum property which is equal to EP treated surface, in addition, from a characteristic of CP, the treatment of complicated shape products is possible such as flexible tubes.

Materials | 304(L),316(L) |
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Standard polishing amount | 5〜10 μm |
Size | Max 700 mm |
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SUSpika (304) -
Electropolishing (304)
SUSpika treated surface is as well as EP treated surface !

Outgassing rate / unit area (304)
Outgassing rate is equal to EP treated
sample !
With vacuum baking,
outgassing rate 〜10-10 Pa・m・s-1!
304 inner surface of flexible tube
After treatment, it is confirmed that the inner surface became glossy.